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Laser micromachining for optoelectronic device fabrication : 30 October 2002, Brugge, Belgium
Andreas Ostendorf, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society ... [et al.]
2003 International Semiconductor Conference : 26th edition, September 28-October 2, 2003, Sinaia, Romania : CAS 2003 proceedings, plenary session, nanoscience and nanoengineering, micromachined devices and circuits for microwave and millimeter wave applications, microoptics and microphotonics, sensors and MEMS
[organized by National Institute for Research and Development in Microtechnologies (IMT-Bucharest) ; under the aegis of Romanian Academy Electrochemical Society Inc. ; co-sponsored by IEEE Electron Devices Society ... [et al.]]
2002 International Semiconductor Conference : 25th edition, October 8-12, 2002, Sinaia, Romania : CAS 2002 proceedings, micromachined devices and circuits for microwave and millimeter wave applications, microtransducers and microsystems nanoscience and nanoengineering, microoptics and microphotonics
[organized by National Institute for Research and Development in Microtechnologies (IMT-Bucharest) ; under the aegis of Romanian Academy Electrochemical Society Inc. ; co-sponsored by IEEE Electron Devices Society ... [et al.]]
Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China
Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU... [et al.]
Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA
Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA
Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)